Back to Search Start Over

Versatile UHV sample transfer system

Authors :
L.C. Emerson
L. Heatherly
R. E. Clausing
Source :
Journal of Vacuum Science and Technology. 16:708-710
Publication Year :
1979
Publisher :
American Vacuum Society, 1979.

Abstract

A vacuum transfer system has been developed that allows samples to be inserted from air into an Auger analyzer. Following an initial analysis they may then be moved to and from a separate vacuum chamber for other studies. The system is constructed of standard UHV components and can be fabricated to cover any desired transfer distance. Allā€metal sealed valves isolate the various chambers so that the vacuum integrity of each is maintained. The sample size is limited only by the smallest constriction within the components, which is 2 cm in the system described. The transfer is rapid and is capable of being controlled remotely for use in a hostile environment.

Details

ISSN :
00225355
Volume :
16
Database :
OpenAIRE
Journal :
Journal of Vacuum Science and Technology
Accession number :
edsair.doi...........0cdacd442e5070c83cf91a7392b9a0ba
Full Text :
https://doi.org/10.1116/1.570063