Back to Search
Start Over
Versatile UHV sample transfer system
- Source :
- Journal of Vacuum Science and Technology. 16:708-710
- Publication Year :
- 1979
- Publisher :
- American Vacuum Society, 1979.
-
Abstract
- A vacuum transfer system has been developed that allows samples to be inserted from air into an Auger analyzer. Following an initial analysis they may then be moved to and from a separate vacuum chamber for other studies. The system is constructed of standard UHV components and can be fabricated to cover any desired transfer distance. Allāmetal sealed valves isolate the various chambers so that the vacuum integrity of each is maintained. The sample size is limited only by the smallest constriction within the components, which is 2 cm in the system described. The transfer is rapid and is capable of being controlled remotely for use in a hostile environment.
Details
- ISSN :
- 00225355
- Volume :
- 16
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science and Technology
- Accession number :
- edsair.doi...........0cdacd442e5070c83cf91a7392b9a0ba
- Full Text :
- https://doi.org/10.1116/1.570063