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Submicroradian laser beam angular scan precision measurement by interference method
- Source :
- Optical Engineering. 48:073607
- Publication Year :
- 2009
- Publisher :
- SPIE-Intl Soc Optical Eng, 2009.
-
Abstract
- Laser beam angular scan accuracy measurement plays an important role in many fields. A sub-microradian laser beam scan precision measurement method that utilizes the wavefront interference method with a Zygo interferometer is proposed. The experimental results show that the measurement accuracy is approximately 0.04 µrad, and the new method is very effective and feasible.
Details
- ISSN :
- 00913286
- Volume :
- 48
- Database :
- OpenAIRE
- Journal :
- Optical Engineering
- Accession number :
- edsair.doi...........0e0e45517a3175b983485ac41a53d76a