Comparison of electron attenuation lengths and escape depths with inelastic mean free paths

It is shown that calculations of electron attenuation lengths and escape depths would require modification of definitions proposed in the literature, since these definition are not universally applicable. Exemplary experimental arrangements are indicated for which more general definitions are necessary, and such definitions are proposed. A Monte Carlo program has been developed with which it is possible to estimate attenuation lengths and escape depths. A comparison of these parameters is made for photoelectrons arising from s levels.