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The structure, oxygen vacancies and magnetic properties of TiOx (0 < x < 2) synthesized by plasma assisted chemical vapor deposition and reduction
- Source :
- Materials Letters. 228:212-215
- Publication Year :
- 2018
- Publisher :
- Elsevier BV, 2018.
-
Abstract
- TiO2 thin film was deposited by Plasma Assisted Chemical Vapor Deposition (PECVD), and TiOx (0
- Subjects :
- 010302 applied physics
Materials science
Mechanical Engineering
technology, industry, and agriculture
chemistry.chemical_element
02 engineering and technology
Chemical vapor deposition
Plasma
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Oxygen
Reduction (complexity)
chemistry
Chemical engineering
Mechanics of Materials
Plasma-enhanced chemical vapor deposition
0103 physical sciences
General Materials Science
Thin film
0210 nano-technology
Subjects
Details
- ISSN :
- 0167577X
- Volume :
- 228
- Database :
- OpenAIRE
- Journal :
- Materials Letters
- Accession number :
- edsair.doi...........0e60515d050f8f5067769ddc6bf2194b
- Full Text :
- https://doi.org/10.1016/j.matlet.2018.06.009