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62‐1: Large‐Area Ion Implantation Source for Production of Anti‐Reflection Surfaces in Glass and Sapphire Substrates

Authors :
Alexander Welsh
Robert Weiss
David Brown
Nicholas White
Source :
SID Symposium Digest of Technical Papers. 53:808-811
Publication Year :
2022
Publisher :
Wiley, 2022.

Subjects

Subjects :
Organic Chemistry
Biochemistry

Details

ISSN :
21680159 and 0097966X
Volume :
53
Database :
OpenAIRE
Journal :
SID Symposium Digest of Technical Papers
Accession number :
edsair.doi...........1008ea1293edd3800b2096625d246dd4

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