Damage Performance of Ion Beam Sputtered Sc2O3 and HfO2 Single Layers Tested in Air and Ultra-high Vacuum

Results of a study of laser induced damage of ion beam sputtered single layers and capped single layers of Sc2O3, HfO2 and Ta2O5 in a controlled atmosphere and in an ultra-high vacuum (UHV) show the choice of material is paramount to achieving the best performance.