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Highly Sensitive Wave Height Sensor with MEMS Piezoresistive Cantilever and Waterproof Membrane

Authors :
Takuto Hirayama
Hidetoshi Takahashi
Source :
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Publication Year :
2023
Publisher :
IEEE, 2023.

Details

Database :
OpenAIRE
Journal :
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Accession number :
edsair.doi...........10d9f77f20a1501455adc719a5c30755
Full Text :
https://doi.org/10.1109/mems49605.2023.10052152