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Fast-Precision Measurement Method of Linear Motor Mover Position

Fast-Precision Measurement Method of Linear Motor Mover Position

Authors :
方媛 Fang Yuan
宫凯歌 Gong Kai-ge
周杨 Zhou Yang
赵静 Zhao Jing
Source :
Laser & Optoelectronics Progress. 57:181005
Publication Year :
2020
Publisher :
Shanghai Institute of Optics and Fine Mechanics, 2020.

Details

ISSN :
10064125
Volume :
57
Database :
OpenAIRE
Journal :
Laser & Optoelectronics Progress
Accession number :
edsair.doi...........12141f7ea15be5805e92660208756a1b
Full Text :
https://doi.org/10.3788/lop57.181005