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Fast-Precision Measurement Method of Linear Motor Mover Position
Fast-Precision Measurement Method of Linear Motor Mover Position
- Source :
- Laser & Optoelectronics Progress. 57:181005
- Publication Year :
- 2020
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2020.
Details
- ISSN :
- 10064125
- Volume :
- 57
- Database :
- OpenAIRE
- Journal :
- Laser & Optoelectronics Progress
- Accession number :
- edsair.doi...........12141f7ea15be5805e92660208756a1b
- Full Text :
- https://doi.org/10.3788/lop57.181005