Deposition of thin films using the ionised cluster beam method

MLA

S E Huq, et al. “Deposition of Thin Films Using the Ionised Cluster Beam Method.” Semiconductor Science and Technology, vol. 5, July 1990, pp. 771–81. EBSCOhost, https://doi.org/10.1088/0268-1242/5/7/023.

APA

S E Huq, R A McMahon, & Haroon Ahmed. (1990). Deposition of thin films using the ionised cluster beam method. Semiconductor Science and Technology, 5, 771–781. https://doi.org/10.1088/0268-1242/5/7/023

Chicago

S E Huq, R A McMahon, and Haroon Ahmed. 1990. “Deposition of Thin Films Using the Ionised Cluster Beam Method.” Semiconductor Science and Technology 5 (July): 771–81. doi:10.1088/0268-1242/5/7/023.