Experimental investigation of the adhesion force of single and double-layer coatings on MEMS surfaces

Authors :: Mehdi Zadsar
Mehdi Salehi
Meisam Vahabi
Mahdi Joulaei
Mojtaba Kolahdoozan
Source :: Surface and Interface Analysis. 51:419-426
Publication Year :: 2018
Publisher :: Wiley, 2018.

Subjects :: 010302 applied physics
Double layer (biology)
Microelectromechanical systems
Materials science
02 engineering and technology
Surfaces and Interfaces
General Chemistry
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Surfaces, Coatings and Films
0103 physical sciences
Materials Chemistry
Adhesion force
Composite material
0210 nano-technology

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