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Molybdenum precursor delivery approaches in atomic layer deposition of α-MoO3
- Source :
- Dalton Transactions. 52:902-908
- Publication Year :
- 2023
- Publisher :
- Royal Society of Chemistry (RSC), 2023.
-
Abstract
- We have developed a time-saving alternative plasma enhanced atomic layer deposition process for high-quality α-MoO3 thin films which are suitable for exfoliation.
- Subjects :
- Inorganic Chemistry
Subjects
Details
- ISSN :
- 14779234 and 14779226
- Volume :
- 52
- Database :
- OpenAIRE
- Journal :
- Dalton Transactions
- Accession number :
- edsair.doi...........1258c4acbbb58b88611c1b1774c3bdf7
- Full Text :
- https://doi.org/10.1039/d2dt03702e