Ultra-Sensitive, Real-Time Detection of HCl Using a Transportable NICE-OHMS System

Authors :: Gregory S. Walsh
E. Anne Curtis
Christopher Lucas
Nicola C. G. Black
Geoffrey P. Barwood
Source :: Conference on Lasers and Electro-Optics.
Publication Year :: 2021
Publisher :: Optica Publishing Group, 2021.
Abstract: We report the development of a portable NICE-OHMS device with the aim of ultra-sensitive (<1 nmol/mol), real-time (<1 min) detection of HCl and monitoring of water vapor for applications in microelectronic fabrication cleanrooms.

Subjects :: Fabrication
Materials science
Cleanroom
business.industry
Optoelectronics
Microelectronics
Ohm
business
Water vapor
Ultra sensitive
Laser light

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