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Nano- and micromachining of transparent materials using laser plasma soft X-rays
- Source :
- 2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics.
- Publication Year :
- 2009
- Publisher :
- IEEE, 2009.
-
Abstract
- Laser plasma soft X-rays were applied to fabricate nano- and microstructures on surfaces of transparent materials. The optimized X-ray optics and nano-ablation process of silica glass will be emphasized as key device and process.
Details
- Database :
- OpenAIRE
- Journal :
- 2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics
- Accession number :
- edsair.doi...........14087d1ae2293d39d1db7cf5ad179d38