Process Parameters for Infrared Processing of FePt Nanoparticle Films

Pulse thermal processing (PTP) of FePt nanoparticle films was studied using a high density infrared (HDI) plasma arc lamp. FePt nanoparticle films on silicon substrates were processed using 0.25- second infrared (IR) pulses. The processing was aimed at reaching a peak target temperature for multiple pulses of 550 C. Numerical simulations of the heat transfer for the PTP were performed to determine the operating power levels for the plasma arc lamp. Infrared measurements were conducted to obtain experimental data for the surface temperature of the FePt nanofilm. Parameters needed for the heat-transfer model were identified based on the experimental temperature results. Following the model validation, several numerical simulations were performed to estimate the power levels. It was shown that the FePt nanoparticle films were successfully processed using the power levels provided by the heat-transfer analysis.