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Preparation of self-supporting Au thin films on perforated substrate by releasing from water-soluble sacrificial layer

Authors :
Yu Miyamoto
Takeshi Kawano
Mamiko Nishiuchi
Hirofumi Takikawa
Yoshiyuki Suda
Toru Harigai
Yuma Fujii
Kiminori Kondo
Masafumi Yamano
Hironao Sakaki
Source :
Japanese Journal of Applied Physics. 55:07LE05
Publication Year :
2016
Publisher :
IOP Publishing, 2016.

Abstract

A self-supporting thin film is useful as a target material for laser-driven ion acceleration experiments. In this study, 100-nm-thick sputtered gold (Au) thin films were released from substrates using water-soluble sacrificial layers, and the released films were subsequently scooped up on perforated substrates. Au thin films were deposited by DC plasma sputtering on the sacrificial layers. In the releasing test, sodium chloride (NaCl) was shown to be most suitable as a sacrificial layer for Au thin films. In addition, sputtered Au thin films with thicknesses of 50 and 150 nm were deposited onto NaCl sacrificial layers, released on water, and scooped up on perforated substrates. Self-supporting Au thin films were obtained for all film thicknesses, but wrinkles and cracks appeared in the 50 nm film.

Details

ISSN :
13474065 and 00214922
Volume :
55
Database :
OpenAIRE
Journal :
Japanese Journal of Applied Physics
Accession number :
edsair.doi...........14c878d25352d08230ba85e685c43fe9
Full Text :
https://doi.org/10.7567/jjap.55.07le05