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Preparation of self-supporting Au thin films on perforated substrate by releasing from water-soluble sacrificial layer
- Source :
- Japanese Journal of Applied Physics. 55:07LE05
- Publication Year :
- 2016
- Publisher :
- IOP Publishing, 2016.
-
Abstract
- A self-supporting thin film is useful as a target material for laser-driven ion acceleration experiments. In this study, 100-nm-thick sputtered gold (Au) thin films were released from substrates using water-soluble sacrificial layers, and the released films were subsequently scooped up on perforated substrates. Au thin films were deposited by DC plasma sputtering on the sacrificial layers. In the releasing test, sodium chloride (NaCl) was shown to be most suitable as a sacrificial layer for Au thin films. In addition, sputtered Au thin films with thicknesses of 50 and 150 nm were deposited onto NaCl sacrificial layers, released on water, and scooped up on perforated substrates. Self-supporting Au thin films were obtained for all film thicknesses, but wrinkles and cracks appeared in the 50 nm film.
- Subjects :
- Materials science
genetic structures
010308 nuclear & particles physics
General Engineering
General Physics and Astronomy
Nanotechnology
Substrate (electronics)
Ion acceleration
01 natural sciences
Water soluble
Sputtering
0103 physical sciences
Composite material
Thin film
010306 general physics
Layer (electronics)
Subjects
Details
- ISSN :
- 13474065 and 00214922
- Volume :
- 55
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi...........14c878d25352d08230ba85e685c43fe9
- Full Text :
- https://doi.org/10.7567/jjap.55.07le05