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Estimation of Crystal Orientation of Grains on Polycrystalline Silicon Substrate by Recurrent Neural Network

Authors :
Hikaru Kato
Soichiro Kamibeppu
Takuto Kojima
Tetsuya Matsumoto
Hiroaki Kudo
Yoshinori Takeuchi
Kentaro Kutsukake
Noritaka Usami
Source :
IEEJ Transactions on Electrical and Electronic Engineering. 17:1685-1687
Publication Year :
2022
Publisher :
Wiley, 2022.

Subjects

Subjects :
Electrical and Electronic Engineering

Details

ISSN :
19314981 and 19314973
Volume :
17
Database :
OpenAIRE
Journal :
IEEJ Transactions on Electrical and Electronic Engineering
Accession number :
edsair.doi...........165c1479830fccf7e0ec22ebdccfb82a
Full Text :
https://doi.org/10.1002/tee.23676
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