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Industrial applications of ultrahigh precision short-pulse laser processing (Invited Paper)

Authors :
Xinbing Liu
Source :
SPIE Proceedings.
Publication Year :
2005
Publisher :
SPIE, 2005.

Abstract

Short-pulse lasers of femtosecond and picosecond durations are used in ultrahigh precision processing of optical, electronic, and micro-mechanical devices. In this paper we discuss the fabrication of high quality photonic crystal band-pass filters with femtosecond laser pulses. We also discuss the parallel processing of inkjet nozzles with a picosecond laser. A laser milling algorithm and a high accuracy beam scanner allows the formation of precisely shaped holes as inkjet nozzles, and an efficient diffractive beam splitter allows the simultaneous drilling of many hundreds of holes for low cost manufacturing.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........166dc34ab11ce08857341a72e9904064
Full Text :
https://doi.org/10.1117/12.599113