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DYNAMIC CHARACTERIZATION OF IN-PLANE BULK ACOUSTIC RESONATORS USING HIGH-SENSITIVITY OPTICAL REFLECTION MEASUREMENTS
- Source :
- 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
- Publication Year :
- 2016
- Publisher :
- Transducer Research Foundation, 2016.
Details
- Database :
- OpenAIRE
- Journal :
- 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest
- Accession number :
- edsair.doi...........16e53d4cd909f7397f45abfa686bc4ed