DYNAMIC CHARACTERIZATION OF IN-PLANE BULK ACOUSTIC RESONATORS USING HIGH-SENSITIVITY OPTICAL REFLECTION MEASUREMENTS

Authors :: Vikrant J. Gokhale
Jason J. Gorman
Source :: 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Publication Year :: 2016
Publisher :: Transducer Research Foundation, 2016.

Subjects :: Microelectromechanical systems
In plane
Resonator
Optics
Materials science
business.industry
Modal analysis
NIST
Sensitivity (control systems)
business
Optical reflection
Characterization (materials science)

Database :: OpenAIRE
Journal :: 2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest
Accession number :: edsair.doi...........16e53d4cd909f7397f45abfa686bc4ed

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