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J1101-1-2 An Understanding the Pull-in Phenomenon through the Simulation of Micro Mirror of Gap-closing Electrostatic Type by Macro Model

Authors :
Ryoichi Mimoto
Minoru Sasaki
Shinya Kumagai
Gyu Il Shim
Source :
The proceedings of the JSME annual meeting. :241-242
Publication Year :
2009
Publisher :
Japan Society of Mechanical Engineers, 2009.

Subjects

Subjects :
Physics
Phenomenon
Micro mirror
Mechanical engineering
Macro
Type (model theory)
Closing (morphology)

Details

ISSN :
24331325
Database :
OpenAIRE
Journal :
The proceedings of the JSME annual meeting
Accession number :
edsair.doi...........17ca43b6151b6322f14134dace5cde88
Full Text :
https://doi.org/10.1299/jsmemecjo.2009.7.0_241
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