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Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Authors :
Chacko Jacob
Yoichi Okui
Satoru Ohshima
Shigehiro Nishino
Source :
Materials Science Forum. :331-334
Publication Year :
2002
Publisher :
Trans Tech Publications, Ltd., 2002.

Subjects

Subjects :
Materials science
Si substrate
Mechanics of Materials
business.industry
Mechanical Engineering
Optoelectronics
General Materials Science
Condensed Matter Physics
business
Epitaxy

Details

ISSN :
16629752
Database :
OpenAIRE
Journal :
Materials Science Forum
Accession number :
edsair.doi...........1886d2869993eb3f94c873fa4e72aa28

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