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Monte Carlo Simulation of Ga Droplet Movement during the GaAs Langmuir Evaporation

Authors :
Alla G. Nastovjak
Anna A. Spirina
Nataliya L. Shwartz
Igor G. Neizvestny
Source :
Semiconductors. 52:2135-2139
Publication Year :
2018
Publisher :
Pleiades Publishing Ltd, 2018.

Abstract

A kinetic lattice Monte Carlo model is used to study the Ga droplets self-propelled motion along GaAs(111)A and (111)B surfaces during the initial stage of high-temperature annealing. An estimation of the droplet velocity, running along (111)A and (111)B surfaces, in a wide temperature range, is carried out. The mechanism of small Ga drops movement during high-temperature annealing is suggested. Different directions of droplets motion and the morphology of drop-crystal interface on (111)A and (111)B substrates are determined by a difference in the etching rate of (111)A and (111)B facets by liquid gallium. It is shown that metal droplets can cause step bunching.

Details

ISSN :
10906479 and 10637826
Volume :
52
Database :
OpenAIRE
Journal :
Semiconductors
Accession number :
edsair.doi...........190dc8f0baa50ce94099341553d52933
Full Text :
https://doi.org/10.1134/s1063782618160340