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Device Fabrication for the Future?
- Source :
- Physics Bulletin. 30:20-22
- Publication Year :
- 1979
- Publisher :
- IOP Publishing, 1979.
-
Abstract
- Molecular beam epitaxy has recently been developed from surface physics experiments to a device fabrication technology. The technique, its applications and potential are outlined in this article.
Details
- ISSN :
- 00319112
- Volume :
- 30
- Database :
- OpenAIRE
- Journal :
- Physics Bulletin
- Accession number :
- edsair.doi...........1ac530da19ec6c47cf36d26c5632f665
- Full Text :
- https://doi.org/10.1088/0031-9112/30/1/021