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Oriented growth of Al 20 wt% Sn films sputtered from a cylindrical post magnetron

Authors :
H Bangert
W Gärtner
A Wagendristel
C Steinacher
Source :
Vacuum. 40:232
Publication Year :
1990
Publisher :
Elsevier BV, 1990.

Subjects

Subjects :
Materials science
Cavity magnetron
Composite material
Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films

Details

ISSN :
0042207X
Volume :
40
Database :
OpenAIRE
Journal :
Vacuum
Accession number :
edsair.doi...........1c5faf56ce6a07d33a43dabe7f0e4e6e
Full Text :
https://doi.org/10.1016/0042-207x(90)90204-c
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