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Carbon Nanotubes for Interconnects

Authors :
Yuji Awano
Mizuhisa Nihei
Akio Kawabata
Shintaro Sato
Motonobu Sato
Source :
Advanced Interconnects for ULSI Technology
Publication Year :
2012
Publisher :
Wiley, 2012.

Subjects

Subjects :
Materials science
Potential applications of carbon nanotubes
law
Nanotechnology
Carbon nanotube
law.invention

Details

Database :
OpenAIRE
Journal :
Advanced Interconnects for ULSI Technology
Accession number :
edsair.doi...........1d314bbb5ad173ec59b7b45ff89c3a25
Full Text :
https://doi.org/10.1002/9781119963677.ch13
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