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355 nm All-Solid-State Ultraviolet Laser Direct Writing and Etching of Micro-Channels in Borosilicate Glass
- Source :
- Chinese Journal of Lasers. 45:0802003
- Publication Year :
- 2018
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2018.
- Subjects :
- Materials science
business.industry
Borosilicate glass
Laser direct writing
medicine.disease_cause
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
Etching (microfabrication)
All solid state
medicine
Optoelectronics
Electrical and Electronic Engineering
business
Ultraviolet
Subjects
Details
- ISSN :
- 02587025
- Volume :
- 45
- Database :
- OpenAIRE
- Journal :
- Chinese Journal of Lasers
- Accession number :
- edsair.doi...........1d60e1619177d48c03093755b8d4890b