A highly sensitive multi-element HgCdTe e-APD detector for IPDA lidar applications

A 16 element HgCdTe e-APD detector has been developed for lidar receivers that has significant improvements in sensitivity in the spectral range from < 1μm to 4 μm. A demonstration detector consisting of a 4x4 APD detector array, with 80 μm square elements, a custom CMOS readout integrated circuit (ROIC), a closed cycle cooler-Dewar, and support electronics has been designed, fabricated, and tested. The custom ROIC design provides > 6 MHz bandwidth with low noise and 21 selectable gains. Ninety-six arrays were fabricated with 69% of the arrays meeting the dark current spec in the center 4 pixels at 10 V bias where the APD gain was expected to be around 150. Measurements to 12 V on one array showed APD gains of 654 with a gain normalized dark currents of 1.2 fA to 3.2 fA. The lowest dark current array showed a maximum dark current of 6.2 pA at 10 V and 77 K. The 4.4 μm cutoff detector was characterized at an operating temperature of 77K with a 1.55 μm, 1μs wide, laser pulse. The photon conversion efficiency at unity gain was 91%. The mean measured APD gain at 77 K was 308 at 11V, the responsivity was 782 μV/pW, the average NEP was 1.04 fW/Hz1/2. The bandwidth was 6.8 MHz, and the broadband NEP was 2.97 pW. This detector offers a wide spectral response, dynamic range, and substantially improved sensitivity and lifetime for integrated path differential absorption (IPDA) lidar measurements of atmospheric trace gases such as CO2 and CH4.