Back to Search Start Over

Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism

Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism

Authors :
Kazuto Kinoshita
Akiko Hirai
Satoshi Gonda
Ryosuke Kizu
Ichiko Misumi
Source :
Measurement Science and Technology. 30:015004
Publication Year :
2018
Publisher :
IOP Publishing, 2018.

Details

ISSN :
13616501 and 09570233
Volume :
30
Database :
OpenAIRE
Journal :
Measurement Science and Technology
Accession number :
edsair.doi...........1ed78904234d5e545c668d6e008e6ff6
Full Text :
https://doi.org/10.1088/1361-6501/aaf02a