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Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism
Linewidth calibration using a metrological atomic force microscope with a tip-tilting mechanism
- Source :
- Measurement Science and Technology. 30:015004
- Publication Year :
- 2018
- Publisher :
- IOP Publishing, 2018.
- Subjects :
- 0209 industrial biotechnology
Materials science
business.industry
Atomic force microscopy
Applied Mathematics
02 engineering and technology
01 natural sciences
Metrology
010309 optics
Mechanism (engineering)
Laser linewidth
020901 industrial engineering & automation
Optics
Nanometrology
0103 physical sciences
Calibration
business
Instrumentation
Engineering (miscellaneous)
Subjects
Details
- ISSN :
- 13616501 and 09570233
- Volume :
- 30
- Database :
- OpenAIRE
- Journal :
- Measurement Science and Technology
- Accession number :
- edsair.doi...........1ed78904234d5e545c668d6e008e6ff6
- Full Text :
- https://doi.org/10.1088/1361-6501/aaf02a