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Amorphous silicon spot-size converters fabricated with a shadow mask
- Source :
- 2008 5th IEEE International Conference on Group IV Photonics.
- Publication Year :
- 2008
- Publisher :
- IEEE, 2008.
-
Abstract
- A rib-like spot-size converter was fabricated with a KOH etched shadow mask. The improvement in coupling and an expansion of the spot-size were evaluated with simulations and confirmed by transmission loss measurements.
Details
- Database :
- OpenAIRE
- Journal :
- 2008 5th IEEE International Conference on Group IV Photonics
- Accession number :
- edsair.doi...........1ffed9e21c879277b427c98f982ff1f7
- Full Text :
- https://doi.org/10.1109/group4.2008.4638183