SWIR Detection of Front Side Illumination InGaAs PhotoFETs on Si Substrate through Layer Transfer Technology

Authors :: H. Ishii
Kazuaki Oishi
Hiroki Fujishiro
Wen-Hsin Chang
Tetsuji Shimizu
Tatsuro Maeda
Hiroyuki Ishii
Akira Endoh
Source :: Vacuum and Surface Science. 64:74-79
Publication Year :: 2021
Publisher :: Surface Science Society Japan, 2021.

Subjects :: Materials science
Si substrate
business.industry
Transfer (computing)
Front (oceanography)
Optoelectronics
business
Layer (electronics)

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