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Magnetron sputtering
- Source :
- Modern Ion Plating Technology ISBN: 9780323908337
- Publication Year :
- 2023
- Publisher :
- Elsevier, 2023.
Details
- ISBN :
- 978-0-323-90833-7
- ISBNs :
- 9780323908337
- Database :
- OpenAIRE
- Journal :
- Modern Ion Plating Technology ISBN: 9780323908337
- Accession number :
- edsair.doi...........20ac76d538f04dbc5feb11cd4a83e58e