Experimental and theoretical studies of lattice dynamics of Mg-doped InN

Raman studies of Mg-doped InN films with a Mg content from NMg=3.3×1019to5.5×1021cm−3 are reported. Raman and secondary ion mass spectroscopy data on the Mg content have been found to correlate well. Lattice dynamics of hexagonal InN with substitutional impurities and vacancies has been investigated in the framework of the cluster approach. Energy positions of local vibrational modes in InN have been calculated and compared with experimental findings. It is concluded that Raman spectroscopy is a good tool for quantitative characterization of Mg-doped InN.