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Manufacturing Technology for MEMS and IoT Devices Commercialization
- Source :
- Journal of the Japan Society for Precision Engineering. 88:740-744
- Publication Year :
- 2022
- Publisher :
- Japan Society for Precision Engineering, 2022.
- Subjects :
- Mechanical Engineering
Subjects
Details
- ISSN :
- 1882675X and 09120289
- Volume :
- 88
- Database :
- OpenAIRE
- Journal :
- Journal of the Japan Society for Precision Engineering
- Accession number :
- edsair.doi...........222d2c81abb5f83038b8b6a86ef89ed3
- Full Text :
- https://doi.org/10.2493/jjspe.88.740