SPHERICITY NONCONTACT TESTING USING PHASE-SHIFTING INTERFEROMETRY

This paper presents an optical technique for sphericity measurement of a ball by means of phase shift interferometry. The ball is placed in a fixture on a numerically control rotary stage to achieve a 360 degrees inspection. The eccentricity of the rotary stage's spindle is estimated in terms of Zernike polynomials. Experimental procedure, sphericity evaluation, and sphericity measurement results are presented.