Computational thermodynamic study of SiC chemical vapor deposition from MTS‐H 2 *

Authors :: J. Allen Haynes
Brian C. Jolly
David J. Mitchell
Jian Peng
Dongwon Shin
Source :: Journal of the American Ceramic Society. 104:3726-3737
Publication Year :: 2021
Publisher :: Wiley, 2021.

Subjects :: Computational thermodynamics
Materials science
Chemical engineering
Materials Chemistry
Ceramics and Composites
Chemical vapor deposition

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