Cite
Two-dimensional MEMS array for maskless lithography and wavefront modulation
MLA
Milton L. Peabody, et al. “Two-Dimensional MEMS Array for Maskless Lithography and Wavefront Modulation.” SPIE Proceedings, May 2007. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........238c7a8ea01034b8735dc0f85053ddb1&authtype=sso&custid=ns315887.
APA
Milton L. Peabody, G.P. Watson, Daniel Lopez, J.V. Gates, J.E. Bower, Raymond A. Cirelli, Flavio Pardo, Chien-Shing Pai, J.F. Miner, E.J. Ferry, F.P. Klemens, T. W. Sorsch, Vladimir A. Aksyuk, & William M. Mansfield. (2007). Two-dimensional MEMS array for maskless lithography and wavefront modulation. SPIE Proceedings.
Chicago
Milton L. Peabody, G.P. Watson, Daniel Lopez, J.V. Gates, J.E. Bower, Raymond A. Cirelli, Flavio Pardo, et al. 2007. “Two-Dimensional MEMS Array for Maskless Lithography and Wavefront Modulation.” SPIE Proceedings, May. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........238c7a8ea01034b8735dc0f85053ddb1&authtype=sso&custid=ns315887.