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Infrared conductivity mapping for nanoelectronics

Authors :
B. Knoll
Fritz Keilmann
Source :
Applied Physics Letters. 77:3980-3982
Publication Year :
2000
Publisher :
AIP Publishing, 2000.

Abstract

With ever shrinking dimensions in microelectronics, the conductivity performance of charge carriers approaches physical limits and demands tighter control. We show that near-field microscopy carried out at sufficiently long infrared wavelengths—below the plasma frequency—selectively detects and characterizes subsurface mobile carriers with 30 nm resolution, timely for next generation chips as well as for fundamental research, e.g., on low-dimensional electron systems.

Details

ISSN :
10773118 and 00036951
Volume :
77
Database :
OpenAIRE
Journal :
Applied Physics Letters
Accession number :
edsair.doi...........25f375c211c710644c6228c897c271fc