Local tuning of transfer-printed quantum-dot single-photon sources on a CMOS silicon chip

We report local wavelength tuning of quantum-dot single-photon sources integrated on a CMOS silicon chip as well as in-situ spectral matching between two dissimilar sources. All the necessary heterogeneous integration processes were performed in a simple pick-and-place manner based on transfer printing, largely facilitating the fabrication of complicated device structures.