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Study on Film Thickness Uniformity of Magnetron Sputtering System Based on Twin Target

Authors :
Liu Dongmei
Zhang Jing
Wei Boyang
Fu Xiuhua
Geng Yu
Wang Yang
Source :
Acta Optica Sinica. 41:0731001
Publication Year :
2021
Publisher :
Shanghai Institute of Optics and Fine Mechanics, 2021.

Subjects

Subjects :
Materials science
business.industry
Optoelectronics
Sputter deposition
business
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

Details

ISSN :
02532239
Volume :
41
Database :
OpenAIRE
Journal :
Acta Optica Sinica
Accession number :
edsair.doi...........26c40b14243dbdb57fc5f8cf3895153e
Full Text :
https://doi.org/10.3788/aos202141.0731001
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