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Gettering and Defect Engineering in Semiconductor Technology (GADEST 2021)

Authors :
Moritz Brehm
Gunther Springholz
Source :
physica status solidi (a). 218:2100728
Publication Year :
2021
Publisher :
Wiley, 2021.

Subjects

Subjects :
Materials science
Getter
Semiconductor technology
Materials Chemistry
Defect engineering
Surfaces and Interfaces
Electrical and Electronic Engineering
Condensed Matter Physics
Engineering physics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :
18626319 and 18626300
Volume :
218
Database :
OpenAIRE
Journal :
physica status solidi (a)
Accession number :
edsair.doi...........282da940e8afc5b3c7e90d5ce59aa7c9
Full Text :
https://doi.org/10.1002/pssa.202100728
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