A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology

Authors :: Sei Moriyasu
Joon-wan Kim
Hitoshi Ohmori
Yutaka Yamagata
Takehiro Higuchi
Shinya Morita
Source :: Key Engineering Materials. :19-22
Publication Year :: 2003
Publisher :: Trans Tech Publications, Ltd., 2003.

Subjects :: Fabrication
Materials science
Mechanics of Materials
Mechanical Engineering
Metallurgy
General Materials Science
Thick photoresist
Microstructure
Electroplating
Lithography
Multi layer
Grinding

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