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Plasma etching behavior of yttrium‐aluminum oxide composite ceramics

Authors :
Zhuo Tian
Yicheng Tan
Zuoxiang Zhu
Peng Chen
Shanghua Wu
Source :
International Journal of Applied Ceramic Technology. 18:1710-1715
Publication Year :
2021
Publisher :
Wiley, 2021.

Details

ISSN :
17447402 and 1546542X
Volume :
18
Database :
OpenAIRE
Journal :
International Journal of Applied Ceramic Technology
Accession number :
edsair.doi...........29546305d03542de1d9402dbf1b017e5
Full Text :
https://doi.org/10.1111/ijac.13712