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Analysis and correction of eccentricity errors in microsphere surface inspection
- Source :
- Optics and Precision Engineering. 23:2794-2802
- Publication Year :
- 2015
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2015.
Details
- ISSN :
- 1004924X
- Volume :
- 23
- Database :
- OpenAIRE
- Journal :
- Optics and Precision Engineering
- Accession number :
- edsair.doi...........2a12cce8d119dfcaf18da219bfbef6e5