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Analysis and correction of eccentricity errors in microsphere surface inspection

Authors :
刘国栋 Liu Guodong
刘炳国 Liu Bing-guo
卢丙辉 Lu Bing-hui
陈凤东 Chen Fengdong
孙和义 Sun He-yi
Source :
Optics and Precision Engineering. 23:2794-2802
Publication Year :
2015
Publisher :
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2015.

Details

ISSN :
1004924X
Volume :
23
Database :
OpenAIRE
Journal :
Optics and Precision Engineering
Accession number :
edsair.doi...........2a12cce8d119dfcaf18da219bfbef6e5