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Cathodic Deposition of Amorphous Silicon from Tetraethylorthosilicate in Organic Solvents

Authors :
F. A. Kröger
Ryoji Kanno
T. R. Rama Mohan
Osamu Yamamoto
Yasuo Takeda
Chia‐Hao Lee
Source :
Journal of The Electrochemical Society. 128:1221-1224
Publication Year :
1981
Publisher :
The Electrochemical Society, 1981.

Details

ISSN :
19457111 and 00134651
Volume :
128
Database :
OpenAIRE
Journal :
Journal of The Electrochemical Society
Accession number :
edsair.doi...........2a460ac9d43f7f9ad306962aabda20b6
Full Text :
https://doi.org/10.1149/1.2127597