A MEMS Vibrating Edge Supported Plate for the Simultaneous Measurement of Density and Viscosity: Results for Nitrogen, Methylbenzene, Water, 1-Propene,1,1,2,3,3,3-hexafluoro-oxidized-polymd, and Polydimethylsiloxane and Four Certified Reference Materials with Viscosities in the Range (0.038 to 275) mPa·s and Densities between (408 and 1834) kg·m−3 at Temperatures from (313 to 373) K and Pressures up to 60 MPa

The complex resonance frequency of a vibrating edge supported plate fabricated by the methods of MicroElectroMechanical Systems (MEMS) has been described by Goodwin et al. (J. Chem. Eng. Data 2006, 51, 190−208) and can be used to determine the density and viscosity of fluids. Working equations are required to relate the measured and desired quantities. In this article, two decoupled equations are used: one for density, the other for viscosity. For density, two expressions were evaluated. The first has been reported by Harrison et al. (Proc. SPIE 2006, 6111, 61110D) and contains three adjustable parameters, while the second is a purely empirical expression with two coefficients. For viscosity, the expression reported by Goodwin et al. (J. Chem. Eng. Data 2006, 51, 190−208) was used. The complex resonance frequency was measured for nitrogen, methylbenzene, water, 1-propene,1,1,2,3,3,3-hexafluoro-oxidized-polymd, polydimethylsiloxane, and four certified reference materials at temperatures between (313 and 37...