Ferromagnetic Resonance Behaviors of Integrated CoPdAlO Magnetic Film on Coplanar Waveguide

Ferromagnetic Resonance Behaviors of Integrated CoPdAlO Magnetic Film on Coplanar Waveguide Ki Hyeon Kim Department of Physics, Yeungnam University, Gyeongsan 712-749 Masahiro Yamaguchi Department of Electrical and Communication Engineering, Tohoku University, Sendai 980-8579, Japan Jongryoul Kim Department of Metallurgy and Materials Science, Hanyang University, Ansan 425-791 (Received 30 August 2007) CoPdAlO magnetic lms, whose ferromagnetic resonance (FMR) frequency was 4.2 GHz, were deposited on a coplanar waveguide (CPW) by using a RF magnetron sputtering method and were then patterned with a size of 2000 m 50 m 2 m (l w t). In the case of the patterned magnetic lms on CPW, the calculated and the measured FMR frequencies were shifted to around 7 GHz, and the measured characteristic impedance of the CPW was also changed by around 7 GHz. In addition, the propagation wavelength shortening e ect was enhanced by about 17 % up to 7 GHz compared with that of the CPW without magnetic lm. These results show that patterned magnetic lms can be used as band-pass lters and broad-band EMI noise lters in the RF and the microwave regions. PACS numbers: 75.90.+w, 85.70.k, 07.55.-w