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<scp>nanolithography toolbox</scp>—Simplifying the design complexity of microfluidic chips
- Source :
- Journal of Vacuum Science & Technology B. 38:063002
- Publication Year :
- 2020
- Publisher :
- American Vacuum Society, 2020.
-
Abstract
- Microfluidic devices typically require complex shapes such as funnels, spirals, splitters, channels with different widths, or customized objects of arbitrary complexity with a smooth transition between these elements. Device layouts are generally designed by software developed for the design of integrated circuits or by general computer-aided design drawing tools. Both methods have their limitations, making these tasks time consuming. Here, a script-based, time-effective method to generate the layout of various microfluidic chips with complex geometries is presented. The present work uses the nanolithography toolbox (NT), a platform-independent software package, which employs parameterized fundamental blocks (cells) to create microscale and nanoscale structures. In order to demonstrate the functionality and efficiency of the NT, a few classical microfluidic devices were designed using the NT and then fabricated in glass/silicon using standard microfabrication techniques and in poly(dimethylsiloxane) using soft lithography as well as more complex techniques used for flow-through calorimetry. In addition, the functionality of a few of the fabricated devices was tested. The powerful method proposed allows the creation of microfluidic devices with complex layouts in an easy way, simplifying the design process and improving design efficiency. Thus, it holds great potential for broad applications in microfluidic device design.
- Subjects :
- Computer science
Microfluidics
02 engineering and technology
Integrated circuit
01 natural sciences
Soft lithography
law.invention
Software
law
0103 physical sciences
Hardware_INTEGRATEDCIRCUITS
Materials Chemistry
Electrical and Electronic Engineering
Instrumentation
Microscale chemistry
010302 applied physics
business.industry
Process Chemistry and Technology
021001 nanoscience & nanotechnology
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Nanolithography
0210 nano-technology
Engineering design process
business
Computer hardware
Microfabrication
Subjects
Details
- ISSN :
- 21662754 and 21662746
- Volume :
- 38
- Database :
- OpenAIRE
- Journal :
- Journal of Vacuum Science & Technology B
- Accession number :
- edsair.doi...........2c1163ce803e8adb969eb8fc98fe9c0b