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Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution
- Source :
- Journal of Optics. 17:085608
- Publication Year :
- 2015
- Publisher :
- IOP Publishing, 2015.
-
Abstract
- The supplementary zones surrounding an ordinary Fresnel zone plate (FZP) are utilized to improve the optical resolution at focus. Based on the Fresnel–Kirchhoff diffraction formula, an optimization model is used to design the supplementary zones-surrounded FZP (SZFZP). We justified this optimization model by comparing the numerical simulations and experimental measurements in the visible light region. As expected, the comparison shows a good fit between the simulation and measurement. Mostly, both results showed that the optical resolution and the focal intensity in the visible light region are improved by applying the optimized SZFZP. Afterwards, this model is used to design the SZFZP for applications in extreme ultraviolet (EUV) light. At this point, we demonstrated the ability to fabricate the optimized SZFZP in the EUV region. In addition, we simulated the focusing properties for the designed SZFZP. Consequently, the numerical results for EUV light focused by the designed SZFZP exhibited better performances in optical resolution and intensity.
- Subjects :
- Materials science
business.industry
Extreme ultraviolet lithography
Resolution (electron density)
Zone plate
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
law.invention
Kirchhoff's diffraction formula
Optics
law
Extreme ultraviolet
Optoelectronics
business
Focus (optics)
Intensity (heat transfer)
Visible spectrum
Subjects
Details
- ISSN :
- 20408986 and 20408978
- Volume :
- 17
- Database :
- OpenAIRE
- Journal :
- Journal of Optics
- Accession number :
- edsair.doi...........2cef24b06f9648ade1c3424b38c9e841