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Preparation of high purity metals for advanced devices

Authors :
Masahito Uchikoshi
Kouji Mimura
Minoru Isshiki
Source :
Thin Solid Films. 519:8451-8455
Publication Year :
2011
Publisher :
Elsevier BV, 2011.

Abstract

The purity is one of the essential factors of the materials for preparing well controlled materials and devices, because the existence of ppm or sub-ppm level impurities leads to a significant and sometimes critical influence on the material properties and devise performance. Since the development of high technology depends strongly on the availability of high purity metals required for fabricating a new functional device, and furthermore, the purity of commercial pure materials for exploratory material researches is insufficient, the purification process that meets any requirements should be developed. In this article, based on our experience, we will describe how to construct the purification process, purification methods, and the purification of iron as an example.

Details

ISSN :
00406090
Volume :
519
Database :
OpenAIRE
Journal :
Thin Solid Films
Accession number :
edsair.doi...........2d8c91aa02f8237f6860d96dd6dae943
Full Text :
https://doi.org/10.1016/j.tsf.2011.05.038