Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

Authors :: Sham-Tsong Shiue
Chia-Ya Lin
Hung-Yi Lin
Yu-Xian Liu
Liang-Hsun Lai
Source :: Journal of The Electrochemical Society. 158:D445
Publication Year :: 2011
Publisher :: The Electrochemical Society, 2011.

Subjects :: Materials science
Hybrid physical-chemical vapor deposition
Renewable Energy, Sustainability and the Environment
Inorganic chemistry
Combustion chemical vapor deposition
Condensed Matter Physics
Microstructure
Electron beam physical vapor deposition
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Ammonia
chemistry.chemical_compound
Carbon film
chemistry
Plasma-enhanced chemical vapor deposition
Materials Chemistry
Electrochemistry
Deposition (phase transition)

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