Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

MLA

Sham-Tsong Shiue, et al. “Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films.” Journal of The Electrochemical Society, vol. 158, Jan. 2011, p. D445. EBSCOhost, https://doi.org/10.1149/1.3591106.

APA

Sham-Tsong Shiue, Chia-Ya Lin, Hung-Yi Lin, Yu-Xian Liu, & Liang-Hsun Lai. (2011). Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films. Journal of The Electrochemical Society, 158, D445. https://doi.org/10.1149/1.3591106

Chicago

Sham-Tsong Shiue, Chia-Ya Lin, Hung-Yi Lin, Yu-Xian Liu, and Liang-Hsun Lai. 2011. “Effects of Ammonia Addition on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films.” Journal of The Electrochemical Society 158 (January): D445. doi:10.1149/1.3591106.